Calcium Fluoride and Barium Fluoride Crystals in Optics ...
Dec 12, 2014· Calcium fluoride has a long tradition as an optical material in microlithography for semiconductor production. Based on the limited choice of optical materials transmitting well in the deep UV wavelength range, calcium fluoride could establish as an industry standard material for excimer laser optics in projection and illumination optical designs for the microlithography .